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CVD / Diffusion Etching / Cleaning
NH3 BCl3
N2O C2HF5
Cl2 CF4
CO2
SiCl4
Implant / Doping Excimer Laser
SF6 Xe
BF3 4.5%, 5% HCl Mix
PH3 Mix 100ppm H2/Ne
C2H4 O2 / Ne Mix
Ne
방문(양청) 방문(오창) 방문(전의)
30, Yangcheong 3-gil, Ochang-eup, Cheongwon-gu, Cheongju-si, Chungcheongbuk-do, Republic of Korea
TEL : 043-210-4300 / FAX : 043-218-8472
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원익 홈페이지 원익IPS 원익홀딩스 원익QnC 원익머트리얼즈 모멘티브 테크놀로지스 TLi 원익PNE 원익로보틱스 케어랩스 CMS LAB (주)원익 원익큐브 매이플비피 골프&리조트 하늘물빛정원 원익투자파트너스
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